MIT develops maskless wafer patterning, CAD tools for MEMS devices

04/5/2012 | ElectroIQ

Researchers at the Massachusetts Institute of Technology have developed new computer-aided design tools and wafer patterning techniques that don't require photomasks for the design and fabrication of microelectromechanical system devices. Henry Smith, a professor of electrical engineering at MIT, formed a company called LumArray to market the maskless patterning equipment and has sold systems to the National Institute of Standards and Technology and the Defense Microelectronic Activity.

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